Versatile substrate holder for semiconductor wafer prodn. - uses deepened well with central mesa to support wafer

摘要

A substrate-holder (3) used in the automatic the substrate (1) on a mesa (5) raised in the centre of a containing well (6), thus providing space for the circulation of etching or cleaning fluids. The mesa and well edges (6) are chamfered to assist fluids. The mesa and well edges (6) are chamfered to assist fluid flow underneath the substrate and a hole at the mesa centre (7) may be used for holding the substrate in position by external suction. ADVNATAGE - Well and mesa dimensions chosen to accommodate substrates over wider range of dimensional tolerance and mfg. processes.