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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0451566(A)
申请公布日期
1992.02.20
申请号
JP19900161008
申请日期
1990.06.19
申请人
SEIKO EPSON CORP
发明人
KUBOKAWA MICHIYA
分类号
H01L21/82;H01L27/118
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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