| 摘要 |
PURPOSE:To lessen the toxicity of the compsn. and to enhance the coatability and preservable stability by using a specific compd. as a solvent. CONSTITUTION:The compd. expressed by formula is used as the solvent of the compsn. contg. an alkaline-soluble resin, a photosensitive agent contg. an orthoquinone diazide group and the solvent. In the formula, R<1> denotes 1 to 3C alkyl group; R<2>, R<3> denote H or 1 to 3c alkyl group; 3-hydroxy-3-methyl-2- butanone, etc., are usable as the solvent of the formula. A prescribed novolac resin, etc., are usable as the above-mentioned resin and the ester compd. of the 1, 2-naphthoquinonediazide-5-sulfonic acid of 2, 3, 4, 4'- tetrahydroxybenzophenone, etc., are respectively usable as the above-mentioned photosensitive material. |
