| 摘要 |
<p>PURPOSE:To protect a substrate traveling on a carrying apparatus from falling by preparing a negative pressure supply route between an electromagnetic valve and a finger so as to hold a volume that can maintain a predetermined negative pressure throughout the time ranging from when the electromagnetic valve shuts off the supply route to when the driving of a robot hand is stopped by a driving mechanism. CONSTITUTION:When a substrate carrying apparatus is started by a CPU26, a master pressure is measured by a pressure sensor 24, and if the master pressure is higher than -500mmHg, the sensor makes sure that the master pressure is always higher than -500mmHg. If the master pressure is below -500mmHg, a solenoid valve 22 shuts off the finger 20. side from the solenoid valve 22. Next, the CPU 26 issues an emergency stop command to a hand driving mechanism 27, and if the finger 20 is in operation, the CPU 26 immediately takes stop action for the finger 20. Next, the CPU 26 monitors a measured value and waits until the master pressure returns to a level higher than -500mmHg. When the master pressure exceeds -500mmHg, the CPU 26 turns on the solenoid valve 22 via a driver 23 to release emergency stop, thereby causing the apparatus to automatically return. In this way, even when the negative pressure supply stop, the apparatus can protect falling of a substrate.</p> |
