发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 <p>PURPOSE:To get a semiconductor integrated circuit device, which facilitates the identification of data, by providing function cells with patterns for identifying data. CONSTITUTION:Each photomask is constituted of one function cell 1, 2, 3 or 4. And the function cell is provided with a pattern 5 for identifying the function cell 1, and the function cell 2 is provided with a pattern 6 for identifying the function cell 2, and the function cell 3 is provided with a pattern for identifying the function cell 3, and the function cell 4 is provided with a pattern 8 for identifying the function cell 4.</p>
申请公布号 JPH0451512(A) 申请公布日期 1992.02.20
申请号 JP19900161005 申请日期 1990.06.19
申请人 SEIKO EPSON CORP 发明人 KASAHARA SHOICHIRO
分类号 G03F1/38;H01L21/02;H01L21/027 主分类号 G03F1/38
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