| 摘要 |
<p>A cathode body (12) for a rotating cylindrical magnetron (10) wherein the magnetron provides a sputtering zone extending along the length of the cathode body (12) and circumferentially along a relatively narrow region thereof. The cathode body (12) includes an elongated tubular member (14) having a target material (16) at the outer surface thereof. A collar (32) of electrically-conductive material is located at at least one end of the tubular member (14), and extends along the tubular member (14) from that one end into the erosion zone. A sleeve of electrically-conductive material may extend circumferentially around the collar (32).</p> |
