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发明名称
MULTILAYER INTERCONNECTION TYPE SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0451523(A)
申请公布日期
1992.02.20
申请号
JP19900160583
申请日期
1990.06.19
申请人
KAWASAKI STEEL CORP
发明人
ARIYOSHI RYUJI;MURAKAWA EMI;ODA MUNETAKA
分类号
H01L21/316;H01L21/31
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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