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发明名称
PIEZOELECTRIC DRIVING DEVICE
摘要
申请公布号
JPH08105903(A)
申请公布日期
1996.04.23
申请号
JP19940246251
申请日期
1994.10.12
申请人
NIKON CORP
发明人
NAKANO KATSUSHI
分类号
G01B21/30;G01N37/00;G01Q10/04;G01Q60/10;G05D3/00;(IPC1-7):G01N37/00
主分类号
G01B21/30
代理机构
代理人
主权项
地址
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