发明名称 Measuring electrode.
摘要 <p>A measuring electrode (1) for making an electric contact with an object, in particular a semiconductor body (2), comprises an electrically conductive liquid, said liquid contacting the surface of the object via capillaries of a capillary material, said capillaries debouching at said surface. According to the invention the whole electrode body consists of capillary material, said material being fillable by an electrically conductive liquid, with the electrically conductive liquid being retained in the electrode body and fed onto the surface only by the capillary forces of said capillary material. The described construction results in easy handling of the device and accurate and repeatable measurements. &lt;IMAGE&gt;</p>
申请公布号 EP0471350(A2) 申请公布日期 1992.02.19
申请号 EP19910113596 申请日期 1991.08.13
申请人 BIO-PHOTONICS, INC. 发明人 RUBIN, LEONID BORISOVICH, PROF.;UNTILA, GENNADY GRIGOREVICH
分类号 G01R1/067;H01L21/66 主分类号 G01R1/067
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