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发明名称
PROCESS FOR MAKING SEMI-CONDUCTOR FILMS
摘要
申请公布号
EP0165449(B2)
申请公布日期
1992.02.19
申请号
EP19850105795
申请日期
1985.05.11
申请人
BAYER AG
发明人
SCHWIRTLICH, INGO, DR.;WODITSCH, PETER, DR.
分类号
H01L31/04;C01B33/02;C30B15/00;C30B29/64;H01L21/208;(IPC1-7):C30B15/06
主分类号
H01L31/04
代理机构
代理人
主权项
地址
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