发明名称 Positive type photoresist composition.
摘要 <p>A positive type photoresist composition contains (a) 100 parts by weight of a resin which is a polymer compound (A) including carbon-carbon double bonds and having a molecular weight of 300 to 30,000 and an iodine value of 50 to 500. To at least a part of the double bonds of the polymer compound (A), a group represented by the formula (I) is introduced &lt;CHEM&gt; wherein R&lt;1&gt; denotes a hydrogen atom, a halogen atom or an alkyl group having 1 to 3 carbon atoms and R&lt;2&gt; denotes an alkyl group having 1 to 10 carbon atoms, a cycloalkyl group or an aryl group. The composition further contains (b) 25 to 100 parts by weight of a compound containing a quinone diazide unit.</p>
申请公布号 EP0471326(A1) 申请公布日期 1992.02.19
申请号 EP19910113522 申请日期 1991.08.12
申请人 NIPPON OIL CO., LTD. 发明人 YODA, EIJI;SATO, HARUYOSHI, NISSEKI KAGAKU SHATAKU;YAMASITA, YUKIO;YUASA, HITOSHI;OTSUKI, YUTAKA
分类号 C08F8/46;G03F7/023;H01L21/027;H01L21/30;H05K3/00;H05K3/06 主分类号 C08F8/46
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