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经营范围
发明名称
ION BEAM CONTROL SYSTEM
摘要
申请公布号
EP0444935(A3)
申请公布日期
1992.02.19
申请号
EP19910301654
申请日期
1991.02.28
申请人
EATON CORPORATION
发明人
BENVENISTE, VICTOR MAURICE;MCINTYRE, EDWARD KIRBY, JR.
分类号
C23C14/48;H01J27/02;H01J37/08;H01J37/317;H01L21/265;(IPC1-7):H01J37/08
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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