| 摘要 |
PURPOSE:To obtain a sensor characterized by stable operation, easy handling and easy machining by using a transparent substrate such as silicon-on-saphire (SOS) substrate in an optical-address-potential response (LAP) sensor. CONSTITUTION:Specular polishing is performed on both surfaces of a transparent saphire substrate S. A P-type silicon film Si is formed on one surface of the SOS substrate S. A high-concentration doped region P is formed on the SOS substrate S other than the light receiving part of the film Si. The surface including the island-shaped light receiving silicon part is covered with an insulating film SiX, and an electrode T is formed. Thus, the LAP sensor is formed. With this constitution using the SOS, the biochemical sensor characterized by stable operation and easy handling and machining is obtained. |
