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发明名称
ELECTRON SHOWER AND SYSTEM THEREFOR
摘要
申请公布号
JPH0451437(A)
申请公布日期
1992.02.19
申请号
JP19900159738
申请日期
1990.06.20
申请人
HITACHI LTD
发明人
SAKAI KATSUHIKO
分类号
H01J37/04;H01J37/317;H01L21/027
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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