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发明名称
CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号
JPH0451439(A)
申请公布日期
1992.02.19
申请号
JP19900159663
申请日期
1990.06.20
申请人
HITACHI LTD
发明人
MATSUI HIRONOBU;ICHIHASHI MIKIO;UEDA SHINJIRO;OTAKA TADASHI
分类号
H01J37/16;H01J37/18
主分类号
H01J37/16
代理机构
代理人
主权项
地址
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