A polishing device has a working area into which cold gas is fed continuously in order to cool the partial work-piece surfaces where work is to be performed to a temperature at which no changes occur to the work-piece surface except for polishing.
申请公布号
US5088241(A)
申请公布日期
1992.02.18
申请号
US19900603914
申请日期
1990.10.25
申请人
MG
发明人
LUBBERING, JOHANNES;IHME, PETER;BUSSE, JURGEN;SCHMITZ, ERWIN;VOLKER, WOLFGANG
