发明名称 PARTICLE BEAM GENERATOR
摘要 2089659 9203838 PCTABS00011 A method for irradiating a workpiece (11), such as a strand, by charged particle, e.g. electron, bombardment is in accordance with the following steps: generating a charged particle beam (43) at one end of an elongated vaccum chamber (64) by thermionic emission from an elongated emitter (50a, 50b); accelerating the ribbon beam (43) toward a longitudinally extending, radially curved window member (52), such as a tube, extending transversely across another end of the vacuum chamber (64), the window tube (52) having a length related to the width of the ribbon beams (43, 44); dynamically deflecting the ribbon beam (43) periodically back and forth to define a sweep field which contains the curved window member (52) therein in accordance with a common predetermined deflection driving signal (68); dynamically converging the deflected ribbon beam (43) onto the active area (42) of the curved window in consonance with the deflection of the beam, in accordance with a predetermined convergence driving signal phase (49) related to the deflection driving signal (68), so that the ribbon beam (43) sweeps continuously and substantially perpendicularly over substantially the entire active area (42) of the window (52), and drawing the workpiece (11) to be irradiated through a passageway (62, 63) defined adjacent to the active area (42) of the window tube (52) as the ribbon beams (43, 44) sweep over the active area (42), thereby to cause charged particle bombardment of the workpiece (11). A particle beam irradiator (66) preferably implemented as a coaxial electron ribbon beam and its irradiation method form aspects of the present invention.
申请公布号 CA2089659(A1) 申请公布日期 1992.02.18
申请号 CA19912089659 申请日期 1991.08.16
申请人 RAYCHEM CORPORATION 发明人 SCHUETZ, MARLIN N.;VROOM, DAVID A.
分类号 B01J19/08;G21K5/04;H01J33/00;H01J37/06;H01J37/147;H01J37/30;(IPC1-7):H01J33/00;H01J33/04;H01J37/00 主分类号 B01J19/08
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