| 摘要 |
PURPOSE:To raise control frequency and shorten step positioning response time by attaching an acceleration sensor to a precise X-Y stage so as to detect the acceleration, and extracting only the object frequency band by a band path filter, and adding the acceleration and a feedback loop, as a minor loop, into a control loop. CONSTITUTION:This is a filter circuit for extracting target frequency band, comprising a jerk gauge 9, an acceleration gauge 10, and a minor feedback loop 11. An acceleration sensor 12 is attached to the vicinity of a Y direction measuring mirror 8, to sensitively detect the resonance peak of the rolling mode in Y direction to become a problem. At this time, it is attached to the position where it picks up the vibration above 200Hz as rarely as possible. |
