发明名称 Method of manufacturing semiconductor integrated circuit bipolar transistor device
摘要 A method of manufacturing a bipolar transistor having a base lead-out electrode provided so as to surround an emitter region to be formed on a main surface of a semiconductor substrate and also having an emitter lead-out electrode provided along a stepped shape of the base lead-out electrode and connected to said emitter region is characterized by forming a first silicon film selectively only in an area surrounded by the base lead-out electrode. Impurity is introduced into the first silicon film and then diffused into the main surface of the semiconductor substrate to form the emitter region. Finally, a second silicon film is formed on the first silicon film to serve as the emitter lead-out electrode.
申请公布号 US5089430(A) 申请公布日期 1992.02.18
申请号 US19900509223 申请日期 1990.04.16
申请人 HITACHI, LTD. 发明人 OWADA, NOBUO;UDA, HIZURU
分类号 H01L29/73;H01L21/285;H01L21/331;H01L21/60;H01L21/8222;H01L27/06;H01L29/732 主分类号 H01L29/73
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