发明名称 Stabilized laser platform and module interface
摘要 <p>A laser system support structure is provided having an independent, kinematically mounted chamber and optics platform. Swivel-type mounts are used to couple the platform at three points to the laser support frame, thereby allowing the platform to remain static while the support frame, via the swivel mounts, deflects around the platform in response to external forces. The independent platform design provides secondary benefits of creating a compartmentalization of laser system components, leading to a modular type design. Each laser system module is mounted to the support structure on an extension rail, to allow removal of the module from the support frame for easy access during servicing. &lt;IMAGE&gt;</p>
申请公布号 EP0783120(A2) 申请公布日期 1997.07.09
申请号 EP19970300008 申请日期 1997.01.02
申请人 CYMER, INC. 发明人 LARSON, DONALD GLENN;DERUYTER, ANTHONY JOHN;MIXON, CURTISS LYNN;GERENT, JERRY RUDY
分类号 G12B5/00;G02B7/00;H01S3/02;H01S3/225;(IPC1-7):G02B7/00 主分类号 G12B5/00
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