发明名称 BALL FORMING METHOD AND EQUIPMENT IN WIRE BONDER
摘要 PROBLEM TO BE SOLVED: To enable forming always a normal ball even if abnormal discharge happens between a wire sent to the tip of a capillary and a torch rod. SOLUTION: A wire 4 is inserted in a capillary 3. From a high voltage DC power supply 1, a DC voltage is applied between the tip of the wire 4 and the torch rod 7, through a constant current switch 5 and a discharge stabilizer 6. A discharge voltage divider detector 12 for detecting the voltage value applied between the capillary 3 and the torch rod 7 is installed. When the voltage value detected by the detector 12 is lower than or equal to a specific value, the detector 12 supplies a control signal to a current setting apparatus 10. The control signal increases a discharge current, so as to correspond to the decrease amount of the discharge voltage in reference to the above-mentioned specific value.
申请公布号 JPH09181111(A) 申请公布日期 1997.07.11
申请号 JP19950351522 申请日期 1995.12.26
申请人 KAIJO CORP 发明人 URA MASANAO
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址