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发明名称
Ion beam generating apparatus with electronic switching between multiple cathodes
摘要
申请公布号
US5089707(A)
申请公布日期
1992.02.18
申请号
US19900612589
申请日期
1990.11.14
申请人
ISM TECHNOLOGIES, INC.
发明人
MAGNUSON, GUSTAV D.;TOOKER, JOSEPH F.;TREGLIO, JAMES R.
分类号
H01J27/02;H01J27/08;H01J27/22;H01J37/067;H01J37/08
主分类号
H01J27/02
代理机构
代理人
主权项
地址
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