发明名称 DUAL FILAMENT ION SOURCE
摘要 PURPOSE:To attain the long life by arranging a spare filament instead of an electron collector. CONSTITUTION:A spare filament 3' and grid 4 are attached instead of an electron collector, and a chamber voltage is applied to make it serve as a dual filament ion source. The selection between the filament 3 and the spare filament 3' is conducted by switching the power source.
申请公布号 JPS5719949(A) 申请公布日期 1982.02.02
申请号 JP19800092728 申请日期 1980.07.09
申请人 HITACHI LTD 发明人 SENNARI KAZUO
分类号 H01J3/04;H01J27/20;H01J49/14 主分类号 H01J3/04
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