| 摘要 |
PURPOSE:To easily provide composite arrangement of a near field microscope and an super-small microscope using a charged particle beam such as electron beam or ion beam by allowing one vacuum system to serve both for the near view microscope and super-small microscope. CONSTITUTION:An AFM is installed in a ultra-high vacuum vessel 27, which is fitted with a mirror barrel 1 of super-small SEM with xyz motion mechanism 2 as an attachment. The AFM is composed of a specimen table 3, specimen 4, probe 5, cantilever 6, probe 7 for STM, piezo elements 8-11 for XYZ control of the probe, tripod type XYZ scanners 12, 13, a base 14 for mounting of the cantilever 6 and STM, a slider 15 on which the STM is mounted and with which the cantilever 6 approaches and retreats to/from the specimen 4, inching mechanisms 16, 19 for Z1-, Z2-, X-, Y-axes, and a laminate type vibration isolating mechanism. The piezo element 10 of the scanner 12 is controlled, for example, so as to always maintain the attitude of the cantilever 6 by the use of the STM mechanism, and raster scan is made on the specimen 4 by the XY piezo element 11, and thus the surface structure of the specimen 4 is measured.
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