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发明名称
摘要
申请公布号
JPH0418429(U)
申请公布日期
1992.02.17
申请号
JP19900058516U
申请日期
1990.06.01
申请人
发明人
分类号
C30B25/14;H01L21/205;(IPC1-7):H01L21/205
主分类号
C30B25/14
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