| 摘要 |
PURPOSE:To reduce the cost of a sensor, to facilitate the mounting of the sensor to a car and to enhance reliability by forming the conductive fixed electrode opposed to a movable electrode as a single layer or multilayer structure using one or more kind of a metal material. CONSTITUTION:A metal having a high m.p. such as Ni, W or Pt is applied to a glass substrate as a fixed electrode material by sputtering. In order to enhance the film bonding strength to substrates 2, 3, a material having good film bonding properties to the substrates, for example, an Al alloy or Cr is applied to the substrates 2, 3 as an extremely thin layer and a high m.p. metal such as Mo or Ti is further applied thereto to form a two-layer structure consisting of the first and second layers. When acceleration is applied to a sensor 10 in a vertical direction, inertial force acts on an inertia body 5 and a cantilever 4 is bent to change the inertia body 5 in the direction reverse to the acceleration acting on the sensor 10. As a result, the electrostatic capacity of the condensor formed from two upper and lower electrodes 6, 7 and the inertia body 5 changes corresponding to the change of the magnitude of the gaps between the inertia body 5 and the electrodes 6, 7 provided to the substrates 2, 3 and acceleration is detected from the acceleration dependence thereof. |
