WAFER CLEANING DEVICE,申请号JP19900149217-传众专利搜索

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发明名称	WAFER CLEANING DEVICE
摘要
申请公布号	JPH0444227(A)	申请公布日期	1992.02.14
申请号	JP19900149217	申请日期	1990.06.07
申请人	SEIKO EPSON CORP	发明人	YAMAZAKI KAZUO
分类号	H01L21/46;H01L21/304	主分类号	H01L21/46
代理机构		代理人
主权项
地址

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