CARBON JIG FOR SEMICONDUCTOR DIFFUSION FURNACE,申请号JP19900151636-传众专利搜索

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发明名称	CARBON JIG FOR SEMICONDUCTOR DIFFUSION FURNACE
摘要
申请公布号	JPH0444315(A)	申请公布日期	1992.02.14
申请号	JP19900151636	申请日期	1990.06.12
申请人	TOSHIBA CERAMICS CO LTD	发明人	YAMAZAKI HIROSHI
分类号	C23C16/32;H01L21/22	主分类号	C23C16/32
代理机构		代理人
主权项
地址

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