| 发明名称 |
Removal of impurities from a hydride gas. |
| 摘要 |
<p>A process is provided for the removal of impurities from a hydride gas and especially for the removal of disiloxane from silane gas. The removal is accomplished by contacting the impurity containing gas (12) with a hydrogenated getter metal (16) such as a hydrogenated Zr-V-Fe getter alloy. <IMAGE></p> |
| 申请公布号 |
EP0470936(A1) |
申请公布日期 |
1992.02.12 |
| 申请号 |
EP19910830306 |
申请日期 |
1991.07.10 |
| 申请人 |
SAES GETTERS S.P.A. |
发明人 |
SUCCI, MARCO;BOFFITO, CLAUDIO;SOLCIA, CAROLINA |
| 分类号 |
B01D53/02;B01D53/14;B01J20/02;C01B6/34;C01B25/06;C01B33/04;C01C1/02;C22C16/00 |
主分类号 |
B01D53/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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