| 摘要 |
PURPOSE:To obtain a sensor characterized by easy handling, high detecting sensitivity, high reliability, a simple structure and easy manufacturing by mounting a coil around the outer surface of an amorphous magnetic metal layer through an insulating layer, and providing an insulating layer around the outer surface. CONSTITUTION:Coils 26 formed of conductors 12-1, 12-2,... 12-n and 22-1, 22-2,... 22-(n-1) are mounted in a sensor 1 through insulator layers 18 and 20 at the outer surface of an amorphous magnetic alloy layer 19. The outer surface of the coil 26 is covered with a substrate 10 and an insulator layer 25. A unitary structure is formed of these parts. The sensor 1 formed in this way is stuck to a structure material like a metal-resistance linear strain sensor. The amount of the strain of the structure material is detected based on the inductance value of the coil 26. When compressing force or tensile force is applied on the alloy layer 19, the permeability of the alloy layer 19 is changed. Since the alloy layer 19 penetrates through the coil 26 at this time, the change in permeability of the alloy layer 19 due to the compressing force or the tensile force appears as the change in inductance value of the coil 26. |
