| 摘要 |
1487936 Electron-sensitive materials TEXAS INSTRUMENTS Inc 4 Nov 1974 [5 Nov 1973(2)] 47652/74 Heading G2C An electron-sensitive material comprising polyvinylidene fluoride or a copolymer of tetrafluoroethylene with either vinylidene fluoride or with chlorotrifluoroethylene on a support is imagewise exposed to cross-link the exposed areas and then developed by dissolving the unexposed areas, e.g. with a ketone. The developed resist may be baked for 30 minutes at 180‹C to improve adhesion. |
