发明名称 |
Multichannel charged-particle analyzer. |
摘要 |
<p>A charged-particle energy analyzer includes a hollow axi-symmetrical body with an annular opening therein receptive of input electrons from a cylindrical mirror analyzer, the electrons having a distribution of electron energies and a range of electron trajectories. The trajectories each have a radially inward directional component and an axial directional component in a forward direction parallel to the axis. Annular deflectors with negative potentials are disposed coaxially in the body so as to reverse the axial directional components of the electron trajectories. A ring-shaped channel detector detects the electrons relative to radial distance and thereby to energy. <IMAGE></p> |
申请公布号 |
EP0470478(A2) |
申请公布日期 |
1992.02.12 |
申请号 |
EP19910112735 |
申请日期 |
1991.07.29 |
申请人 |
THE PERKIN-ELMER CORPORATION |
发明人 |
GERLACH, ROBERT L.;NEGRI, RONALD E. |
分类号 |
G01Q30/02;H01J37/05;H01J49/48;H01J37/252;H01J49/44 |
主分类号 |
G01Q30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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