| 摘要 |
PURPOSE:To execute pulse laser processing with a high accuracy by successively comparing position information and the moving quantity of an X-Y table and changing the control of the irradiation on and off and timing of a laser beam within one movement command according to the results of the comparison. CONSTITUTION:A central computing device 1 receives the movement completion signal of a microdistance from a computing device 2 for calculating the X-, Y-axis moving quantities of the X-Y table 7 and emits a trigger signal to a pulse generator 8 and an on-off command to a laser power source 9. The movement computing device 2 reads the moving quantity in the microtime of the respective axes of the X-Y table 7 from an absolute counter circuit 3. A driving circuit 4 receives the command from the counter circuit 3 and controls the rotational driving of servo motors 5, 6, thereby moving the X-Y table 7. A laser oscillator 10 generates a laser beam 11 when supplied with an electric power from a laser power source 9 and condenses the laser beam to a work 13 mounted on the X-Y table 7 via laser transmission optical devices 12a, 12b so that the work is irradiated with the laser. |
