| 摘要 |
DESCRIPTIVE Displacement transducer in integrated optics. This transducer comprises a light source (14) emitting a main monochromatic beam (20), a lens (18) for collimating the main beam, a splitting plate (22) for forming a measuring beam (24) and a reference beam (26), a phase displacer (28) for introducing a phase displacement of .pi./2 on part of the reference beam in order to form two reference beams, a first mirror (32) integral with the moving object (34) and a second mirror (30) respectively serving for reflecting the measuring beam and the two reference beams on to the splitting plate, so as to form two interference signals, a splitting mirror (36) for splitting these two interference signals and two detectors (42, 44) for respectively detecting these two interference signals. The transducer is formed in a SiO2/Si3N4/SiO2 optical guide (2), the lens, plate and phase displacer being formed by local etching of the surface layer (10) of the guidel,the second mirror and the splitting mirror being farmed by total etching of the guide. (Fig. 1). |
