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发明名称
CONTACT PROBE
摘要
申请公布号
JPH11201988(A)
申请公布日期
1999.07.30
申请号
JP19980006115
申请日期
1998.01.14
申请人
MITSUBISHI MATERIALS CORP
发明人
MATSUDA ATSUSHI;TACHIKAWA NOBUYOSHI;UEKI MITSUYOSHI;ISHII TOSHINORI;YOSHIDA HIDEAKI
分类号
G01R1/073;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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