| 摘要 |
PURPOSE:To prevent the metallized pad at the surface of a board from being broken by arranging a spacer sheet, where spherical alumina particles and acrylic resin binders for coupling are mixed and made into a sheet shape, between a board and a base plate. CONSTITUTION:A multilayer ceramic board is cut so that the outside dimension may be 200<2> on one side, and then it is sintered under the condition that the sintering temperature is 1650 deg.C, that the sintering atmosphere is the mixture of N2 + hydrogen + steam, and that the sintering temperature is twenty four hours inclusive of temperature rise, maintenance, and temperature drop, whereby a multilayer ceramic board is completed. The spacer sheet 3 is the one where spherical alumina particles 2 and binders for coupling of acrylic resin are mixed and are made into the shaped of a sheet 0.1-0.2mm thick. The spacer sheet 3 is arranged between the face, where the metallized pads for connection are provided, of the multilayer ceramic board 4 already pressure-bonded and the alumina base plate 6, and then sintering is performed. |
