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发明名称
ELECTRICAL CHARACTERISTIC INSPECTION DEVICE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0438845(A)
申请公布日期
1992.02.10
申请号
JP19900144343
申请日期
1990.06.04
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAWAGUCHI KATSUJI;OKINARI KIYOTAKA;UEDA KIYOTOSHI;MITARAI GORO
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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ELECTRIC CONNECTOR
