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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH0439853(A)
申请公布日期
1992.02.10
申请号
JP19900145130
申请日期
1990.06.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
EGUCHI MASANAO
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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