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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH0439927(A)
申请公布日期
1992.02.10
申请号
JP19900145519
申请日期
1990.06.05
申请人
CANON INC
发明人
ITABASHI SATORU
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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