| 摘要 |
PURPOSE:To obtain an excellent adhesive property by providing an org. silicon compd. film having high affinity to respective films of color filters or over coat film and a transparent insulator film or a transparent insulating film between the org. compd. of the former film and the inorg. compd. of the latter film. CONSTITUTION:Color filter substrates of a pigment resist system are respectively applied on a glass substrate 10 and are patterned to form the color filters 11 consisting of red, green and blue. A photosensitive acrylic resin is applied by roll coating thereon and is patterned by photolithography and is cured to form the over coat film 12. After this substrate is washed, the substrate is immersed into an aq. soln. of 1% gamma-amino/propyl/trialkoxy silane and is rinsed and dried to form the org. silicon compd. film 13 Further, this substrate is inserted into a DC magnetron sputtering device and the transparent electrode film 14 is formed by a sputtering method. The adhesive property is improved in this way and the high quality and high density are obtd. |
