| 摘要 |
PURPOSE:To obtain a pyrolytic cell which can sharply enhance the pyrolytic efficiency of a raw-material gas by means of a pyrolytic baffle by providing the following: a crucible which is heated to a prescribed temperature; and the pyrolytic cell which is formed to be fiberlike. CONSTITUTION:At a pyrolytic cell 10, a temperature is controlled by using a thermocouple 17, an electric current for a heater 14 is controlled, a crucible 12 is heated to a pyrolytic temperature at a high temperature, and a fiberlike pyrolytic baffle 18 on the inside is set at a high-temperature state and is kept at nearly the same temperature as that of the crucible 12. A raw-material gas A of a prescribed element is spouted to the inside of the crucible 12 from a gas spouting port 16a of a gas introduction tube 16; and the gas A is passed through a gap of wire materials 18a of the baffle 18 and advances smootly toward the exit of the crucible 12. In this case, the gas A comes into contact with innumerable wire materials 18a of the baffle 18; and it is heated effectively, decomposed quickly and generates a molecular beam B. Since the gas A is pyrolyzed uniformly and effectively in the whole region at this time, the molecular beam B in large quantities is generated from the exit of the crucible 12. Thereby, the molecular beam B in large quantities is supplied to a substrate 2 from the crucible 12; and a thin-film epitaxial layer is crystal-grown on the surface of the substrate 2.
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