发明名称 HIGH PRECISION RETICLE AUTOCHANGER FOR DEMAGNIFICATION PROJECTION ALIGNER
摘要 PURPOSE:To realize precise position alignment, by aquiring position data of a rotary encoder, and using motor variable speed control and slit center position detecting system on the basis of said position data. CONSTITUTION:A CPU 9 is set in the encoder value search mode of a slit position, stores the encoder value of a position A wherein a slit position is detected by a photo interruptor 14, and further stores the encoder value of a position B wherein a slit position comes to be not detected by the interruptor 14. Thereby the CPU 9 can always recognize the present position with the count number of the rotary encoder. Receiving inputs, the CPU 9 selects and outputs the optimum speed pattern regarding an objective position on the basis of the previously stored counter number of each stage number and the present counter number. The output drives a motor 5 via a D/A converter 10 and a motor driving circuit 11.
申请公布号 JPH0437021(A) 申请公布日期 1992.02.07
申请号 JP19900141385 申请日期 1990.06.01
申请人 HITACHI LTD 发明人 SATO MASAMI
分类号 H01L21/30;H01L21/027 主分类号 H01L21/30
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