QUANTITY ANALYSIS SAMPLE AND ION IMPLANTATION AND SECONDARY ION MASS SPECTROMETER WITH ION IMPLANTATION FUNCTION

摘要

PURPOSE:To omit a standard sample besides an analysis objective sample by providing a known amount of the same element as the analysis objective element in the analysis objective sample as an internal standard sample. CONSTITUTION:In a secondary ion mass spectrometer, an ion source 2 is provided to inject a known amount of internal standard element same as the element to be analyzed into a quantity analysis objective sample 11 as an internal standard sample. Symbol 3b shows the aperture for the ion source 2 for injecting an internal standard element and 4b shows the condenser lens for the ion source 2 for injecting an internal standard element. This system shares the system of mass separator 5 to separate mass of ion beam 18 discharged from the primary ion source 1 for analysis purpose and a system of mass separator to separate mass of ion beam 19 discharged out of the ion source 2 for internal standard element injection into the quantity analysis objective sample 11 for known amount of internal standard sample.