| 摘要 |
PURPOSE:To correctly measure a plane coordinate value of an optional point on a pattern which is formed on a photo mask or the like by allowing a substrate holding mechanism to hold and fix a substrate in a vertical direction. CONSTITUTION:A driving motor 12c is actuated to move a table 14 in a Z-axis direction, and when the table 14 comes to a predetermined position in the z-a0xis direction, the actuation of the driving motor 12c is stopped. Then a driving motor 15c is actuated to move a substrate holding plate 16 in an X-axis direction, and when the substrate holding plate 16 comes to a predetermined position in the X-axis direction, the actuation of the driving motor 12c is stopped. Subsequently, a rear face of a photo mask 31 is brought into tight contact with a surface of the substrate holding plate 16 to close a vacuum suction hole 16a, and also an exhaust device connected to a vacuum suction hole 16a is actuated to have the photo mask 31 vacuum-sucked to be held on the surface of the substrate holding plate 16. Then a vacuum suction hole opened at the tip of a slider 17a of a gradient angle adjusting mechanism 17 is closed by a rear face of a lower end of the photo mask 31, the exhaust device connected to the vacuum-suction hole is actuated, and the photo mask 31 is fixed at the tip of the slider 17a. |
