| 摘要 |
<p>PURPOSE:To enlarge the use of a composite sintered body and to obtain high precision by forming a specified pattern on the surface of a ceramic sintered body and/or at least one part of the inner part thereof. CONSTITUTION:A green sheet (A) is obtained by kneading at least one kind selected from Al powder or Al and AlC powders with a binder such as PE. Then, a wiring pattern (B) which consists of metal having m.p. not lower than the sintering temp. of ceramic is obtained by forming a pipe of at least one kind of W and Mo, etc., or alloy contg. them. A molded body (C) is obtained by incorporating the wiring pattern (B) into the component A. Then, a sintered body (D) is obtained by laminating the component (C) and sintering it at >=1000 deg.C in the gaseous N2 atmosphere. Electrically-conductive metal (e.g. Cu) having low m.p. is melted and the part B of the component D is impregnated therewith. The through-holes 6, conductive wirings 2, tips 3 and pins 4 for connection, etc., are provided to a circuit base plate 1. A composite sintered body is produced wherein a metallic pattern described hereunder is formed on the surface and/or at least one part of the inner part. The metallic pattern is air- permeable and has 5-10vol.% porosity and the rate of change in dimension due to sintering is + or -5% as the linear rate of change.</p> |
