DRY ETCHING APPARATUS,申请号JP19900144982-传众专利搜索

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发明名称	DRY ETCHING APPARATUS
摘要
申请公布号	JPH0437125(A)	申请公布日期	1992.02.07
申请号	JP19900144982	申请日期	1990.06.01
申请人	FUJITSU LTD	发明人	KOBAYASHI TORU
分类号	C23F4/00;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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