PURE WATER WASHING VESSEL FOR SEMICONDUCTOR WAFER AND WASHING THEREOF,申请号JP19900143490-传众专利搜索

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发明名称	PURE WATER WASHING VESSEL FOR SEMICONDUCTOR WAFER AND WASHING THEREOF
摘要
申请公布号	JPH0437131(A)	申请公布日期	1992.02.07
申请号	JP19900143490	申请日期	1990.06.01
申请人	FUJI ELECTRIC CO LTD	发明人	SUZUKI HITOSHI
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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