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发明名称
Method for correction of thin film growth temperature
摘要
申请公布号
GB2339964(A)
申请公布日期
2000.02.09
申请号
GB19990017110
申请日期
1999.07.21
申请人
* SHIN-ETSU HANDOTAI CO., LTD
发明人
HISASHI * KASHINO;KOICHI * KANAYA
分类号
H01L21/205;C23C16/52;C30B25/16;(IPC1-7):H01L21/66
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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