SCHLEUDERTELLER FUER SUBSTRATE,申请号DE19904024642-传众专利搜索

发明名称	SCHLEUDERTELLER FUER SUBSTRATE
摘要	A whirling plate for substrates (24) has on the surface of its whirling disk (10) a continuous seal (36) that is pressed from below against the edge (28) of the substrate (24). The substrate (24) can thus be retained by suction on the whirling disk (10). In order to center the substrate (24), a pressing element (60) is moved under suction against the edge (28) of the substrate (24) and presses the same against centering stops of supporting blocks (30).
申请公布号	DE4024642(A1)	申请公布日期	1992.02.06
申请号	DE19904024642	申请日期	1990.08.03
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	SCHMUTZ, WOLFGANG, DR.-ING., 7214 ZIMMERN, DE;GENTISCHER, JOSEF, DIPL.-ING. (FH), 7064 REMSHALDEN, DE;LEHNER, ROLF, DIPL.-ING., 7300 ESSLINGEN, DE;BOEHMER, GUDRUN, DIPL.-ING., 7000 STUTTGART, DE;MODJESCH, DIETER, DIPL.-ING. (FH), 7045 NUFRINGEN, DE
分类号	B05C11/08;B25H1/14;G03F7/16;H01L21/027;H01L21/304;H01L21/683	主分类号	B05C11/08
代理机构		代理人
主权项
地址