Component cooler for vacuum chamber - has stamper-like heat sink inserted in sealed opening and directly contacting base of component

摘要

The cover of an electron beam instrument has an opening with a cooling element (14) set into the vacuum chamber (12). The cooling element is formed with fins (16) across which temp. regulated air (19) is passed. - Temp. regulation is based upon a measured (15) value. The vacuum chamber is sealed by an electrically isolating ring (17) with a seal (18) set into a groove (20). The unit may be adjusted both in terms of its angle of inclination and height.